One-dimensional nanoscale grating standard model passed acceptance

A research team composed of the China Institute of Metrology, Tongji University and National University of Defense Technology has successfully developed a one-dimensional nanoscale grating standard model for the first time in China after three years of scientific and technological research. This topic has recently passed the appraisal and acceptance by the AQSIQ.

The one-dimensional nano-scale grating standard model is one of the five nano-standard models prescribed by the International Bureau of Weights and Measures. Its successful development has broken through the technical bottleneck of the development of China's nanotechnology industry, filling the gap in China's research on nanometric reference materials, and the technical indicators have reached the international advanced level. The achievement of this achievement has made China one of the few countries to master the technique of deposition of atomic gratings, making it possible to localize nanometric reference materials, and will fundamentally solve the problem of traceability and calibration of nanometer measuring instruments in China and change them. The long-term dependence of nanometering on the status quo in foreign countries provides strong technical support for the rapid development of China's nanotechnology industry.

In recent years, China's nanotechnology industry has developed rapidly, but the situation of varying amounts has not been fundamentally resolved. The question of traceability has seriously hampered the development of China's nanotechnology industry and caused great losses to the national economy.

In order to solve the above problems, based on research conducted by the research team led by the Quantum Benchmark Lab of the Institute of Quantum Science at the China Institute of Metrology, in 2006, the project undertook the “Eleventh Five-Year” National Science and Technology Support Program project “Crystal Atom Nanotechnology. Research on Key Technologies for Scale Measurement."

After three years of hard work, the research team mastered the theory and technology of chromium atom deposition nano-grating, established a high-vacuum atom deposition experimental device, and successfully developed a one-dimensional nano-scale grating standard model with a pitch of (213.1±0.5) nm. , passed the measurement verification of professional institutions, and established a special atom deposition nanograting experimental base.